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Preparation of undoped and indium doped ZnO thin films by pulsed laser deposition method
Author(s) -
Kotlyarchuk B.,
Savchuk V.,
Oszwaldowski M.
Publication year - 2005
Publication title -
crystal research and technology
Language(s) - English
Resource type - Journals
SCImago Journal Rank - 0.377
H-Index - 64
eISSN - 1521-4079
pISSN - 0232-1300
DOI - 10.1002/crat.200410502
Subject(s) - pulsed laser deposition , indium , thin film , materials science , doping , substrate (aquarium) , annealing (glass) , deposition (geology) , optoelectronics , zinc , analytical chemistry (journal) , chemical engineering , nanotechnology , chemistry , metallurgy , paleontology , oceanography , chromatography , sediment , geology , engineering , biology
An original modification of the standard Pulse Laser Deposition (PLD) method for preparing both undoped and indium doped zinc oxide (ZnO:In) thin films at low substrate temperature is proposed. This preparation method does not demand any further post‐deposition annealing treatment of the grown films. The developed method allows to grow thin films at low substrate temperature that prevents them from the considerable loss of their intrinsic electrical and optical properties. The influence of deposition parameters on the electrical and optical parameters of the undoped and the indium doped ZnO thin films is also analysed. (© 2005 WILEY‐VCH Verlag GmbH & Co. KGaA, Weinheim)