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Numerical study of the effects of cusp‐shaped magnetic fields and thermal conductivity on the melt‐crystal interface in CZ crystal growth
Author(s) -
Kakimoto Koichi,
Liu Lijun
Publication year - 2003
Publication title -
crystal research and technology
Language(s) - English
Resource type - Journals
SCImago Journal Rank - 0.377
H-Index - 64
eISSN - 1521-4079
pISSN - 0232-1300
DOI - 10.1002/crat.200310086
Subject(s) - crystal (programming language) , magnetic field , thermal conductivity , materials science , condensed matter physics , crystal growth , cusp (singularity) , thermal , melt flow index , field (mathematics) , conductivity , composite material , crystallography , chemistry , geometry , thermodynamics , physics , mathematics , computer science , quantum mechanics , copolymer , programming language , polymer , pure mathematics
A numerical study was carried out to determine the effects of magnetic fields and thermal conductivity of a crystal on the melt flow in a crystal growth system. Comparisons of computations for the case of no magnetic field and for two types of cusp‐shaped magnetic fields were made. The effect of thermal conductivity of a crystal on the shape of a melt‐crystal interface was also investigated. The computation results showed that the magnetic fields have clear effects on both the pattern and strength of flow of the melt and the interface shape. Application of a magnetic field to the Czochralski system is therefore an effective tool for controlling the quality of bulk crystal during Czochralski growth process. The results also showed that the shape of the interface could be modified by changing thermal conductivity of silicon.