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Controlling the axial temperature gradient in inductively heated Czochralski systems
Author(s) -
Ganschow S.,
Reiche P.,
Ziem M.,
Uecker R.
Publication year - 2003
Publication title -
crystal research and technology
Language(s) - English
Resource type - Journals
SCImago Journal Rank - 0.377
H-Index - 64
eISSN - 1521-4079
pISSN - 0232-1300
DOI - 10.1002/crat.200310005
Subject(s) - crucible (geodemography) , induction coil , temperature gradient , electromagnetic coil , induction heating , materials science , heating system , analytical chemistry (journal) , heat load , chemistry , thermodynamics , electrical engineering , physics , chromatography , meteorology , computational chemistry , engineering
A heating system is described that allows to increase the temperature gradients in rf‐heated Czochralski setups during the growth. This system applies an active afterheater, operated by a separate induction coil parallel to that heating the crucible. By changing the inductivity of an additional coil located outside the growth chamber, the ratio of the rf currents flowing through the crucible and afterheater and, consequently, the geometry of the heat input to the setup can be altered. The efficiency of the heating systems has been demonstrated in various experiments.