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On the backscattering factor in quantitative Auger electron spectroscopy of binary alloys
Author(s) -
Berndt H.,
Streubel P.,
Meisel A.
Publication year - 1980
Publication title -
kristall und technik
Language(s) - English
Resource type - Journals
SCImago Journal Rank - 0.377
H-Index - 64
eISSN - 1521-4079
pISSN - 0023-4753
DOI - 10.1002/crat.19800151224
Subject(s) - auger electron spectroscopy , auger , electron , atomic physics , auger effect , matrix (chemical analysis) , materials science , spectroscopy , physics , chemistry , nuclear physics , quantum mechanics , composite material
The matrix dependent relative sensitivity factor S rel ( c ) is considered for use in quantitative Auger analysis. It is affected by matrix dependent factors like the backscattering factor, the escape depth of Auger electrons and the number of atoms per unit volume. The backscattering factor, especially, is evaluated and possibilities of its determination are shown. Measurements of Auger intensities and of the energy distribution of backscattered electrons were carried out for this purpose on a series of CuPd and CuSb alloys, respectively. The backscattering factor thus obtained is compared with values resulting from a formula of J ABLONSKI and by experimental data of S MITH and G ALLON .