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Microscopy with an ellipsometric arrangement
Author(s) -
Löschke K.
Publication year - 1979
Publication title -
kristall und technik
Language(s) - English
Resource type - Journals
SCImago Journal Rank - 0.377
H-Index - 64
eISSN - 1521-4079
pISSN - 0023-4753
DOI - 10.1002/crat.19790140616
Subject(s) - ellipsometry , optics , polarization (electrochemistry) , sample (material) , contrast (vision) , resolution (logic) , microscopy , materials science , surface (topology) , optical microscope , physics , chemistry , thin film , nanotechnology , computer science , scanning electron microscope , mathematics , geometry , artificial intelligence , chromatography
A method is given to observe a sample with an ellipsometer equipment allowing a microscopical observation of a reflecting surface. The microscopical images are contrasted by the elliptical polarization and reflect the inhomogeneity of the optical properties of the surface. The contrast is of the high resolution of the ellipsometrical method registrating very low variations of optical properties of the reflecting sample. In this paper we give par example an observation of a step of a native oxide film on GaAs of only three Ångstroms.