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X‐ray crystal orientation determination for semiconductor single crystals
Author(s) -
Keppler U.,
Meier M.,
Neifeind A.,
Rohmer C.
Publication year - 1975
Publication title -
kristall und technik
Language(s) - English
Resource type - Journals
SCImago Journal Rank - 0.377
H-Index - 64
eISSN - 1521-4079
pISSN - 0023-4753
DOI - 10.1002/crat.19750100107
Subject(s) - goniometer , semiconductor , orientation (vector space) , materials science , precession , x ray , optics , crystal (programming language) , single crystal , optoelectronics , physics , geometry , computer science , condensed matter physics , nuclear magnetic resonance , mathematics , programming language
An improved method to measu reorientation angles of flat single crystals was developed taking Buerger precession technique. The method is described and compared with Laue‐ and goniometer techniques. Advantages are low costs and short measuring time. An easy evaluation of the records allows to take this method as a routine angle determination for semiconductor manufacturing.