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Etching of GaP crystals by solutions containing halogenides
Author(s) -
Harsy M.
Publication year - 1968
Publication title -
kristall und technik
Language(s) - English
Resource type - Journals
SCImago Journal Rank - 0.377
H-Index - 64
eISSN - 1521-4079
pISSN - 0023-4753
DOI - 10.1002/crat.19680030430
Subject(s) - citation , library science , etching (microfabrication) , engineering physics , nanotechnology , physics , materials science , computer science , layer (electronics)

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