Premium
Speed Dependence of Thermochemical Nanolithography for Gray‐Scale Patterning
Author(s) -
Carroll Keith M.,
Desai Maitri,
Giordano Anthony J.,
Scrimgeour Jan,
King William P.,
Riedo Elisa,
Curtis Jennifer E.
Publication year - 2014
Publication title -
chemphyschem
Language(s) - English
Resource type - Journals
SCImago Journal Rank - 1.016
H-Index - 140
eISSN - 1439-7641
pISSN - 1439-4235
DOI - 10.1002/cphc.201402168
Subject(s) - nanomanufacturing , nanolithography , nanotechnology , cantilever , lithography , dip pen nanolithography , materials science , fabrication , optoelectronics , medicine , alternative medicine , composite material , pathology
Thermochemical nanolithography (TCNL) is a high‐resolution lithographic technique and, owing to its fast speed, versatility, and unique ability to fabricate arbitrary, gray‐scale nanopatterns, this scanning probe technique is relevant both for fundamental scientific research as well as for nanomanufacturing applications. In this work, we study the dependence of the TCNL driven chemical reactions on the translation speed of the thermal cantilever. The experimental data compares well with a model of the chemical kinetics for a first‐order reaction. The impact of higher order reactions on the optimization of TCNL is addressed. The reported quantitative description of the speed dependence of TCNL is exploited and illustrated by fabricating controlled gradients of chemical concentration.