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High‐Amplitude versus Low‐Amplitude Current Oscillations during the Anodic Oxidation of p ‐Type Silicon in Fluoride Containing Electrolytes
Author(s) -
Schönleber Konrad,
Krischer Katharina
Publication year - 2012
Publication title -
chemphyschem
Language(s) - English
Resource type - Journals
SCImago Journal Rank - 1.016
H-Index - 140
eISSN - 1439-7641
pISSN - 1439-4235
DOI - 10.1002/cphc.201200230
Subject(s) - amplitude , electrolyte , ammonium fluoride , current (fluid) , dissolution , silicon , chemistry , fluoride , electrochemistry , analytical chemistry (journal) , anode , oscillation (cell signaling) , oxide , inorganic chemistry , materials science , chemical physics , electrode , optoelectronics , physics , thermodynamics , optics , biochemistry , chromatography , organic chemistry
Sustained electrochemical oscillations at p ‐type Si(100) in a dilute ammonium fluoride electrolyte are investigated by means of ellipsometric intensity and hydrogen measurements. Two main types of oscillations are identified, one with a low and one with a high current amplitude. It is demonstrated that the low‐current amplitude oscillations do not involve any variations in oxide quality or etch rate. Furthermore, experimental results suggest that the high‐amplitude current oscillations emerge from the low‐amplitude current oscillations and thus share the feedback loops causing the oscillatory instability. Hence, the origin of oscillations during anodic dissolution of silicon has to be reconsidered.