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Charge Distribution and Stability of SiO 2 Nanoarray Electret
Author(s) -
Liang Fei,
Li Hua Yang,
Wang Ying,
Kuang Shuang Yang,
Fan You Jun,
Wang Zhong Lin,
Zhu Guang
Publication year - 2020
Publication title -
chemnanomat
Language(s) - English
Resource type - Journals
SCImago Journal Rank - 0.947
H-Index - 32
ISSN - 2199-692X
DOI - 10.1002/cnma.201900632
Subject(s) - electret , materials science , charge (physics) , charge density , diffusion , percolation (cognitive psychology) , nanotechnology , optoelectronics , chemical physics , composite material , chemistry , physics , quantum mechanics , neuroscience , biology , thermodynamics
Abstract The devices based on SiO 2 electret have significant applications in various MEMS sensors. However, the charge stability of SiO 2 electret suffered from the water percolation, which seriously restricts its application. In this work, the long‐term charge stability of the SiO 2 nanoarray electret (SiO 2 NAE) without any water repellent treatment is demonstrated. When the oxidation time is 1.5 h, the potential decay of the SiO 2 NAE is less than 46% during 60 days with an original potential of −120 V. The long‐term charge stability of the SiO 2 NAE is attributed to its unique charge decay process and the large H 2 O diffusion barrier in the SiO 2 NAE: firstly, the charge trapped in the planar part of the SiO 2 NAE decays rapidly. Then, residual charge stored in the SiO 2 nanoarray. Eventually, the large H 2 O diffusion barrier in the interface of Si/SiO 2 effectively hinders the charge decay. In addition, we demonstrate the unique charge stability of nanoelectret, which has a promising application in developing high performance electret‐based devices.