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185. Plasma‐unterstützte Abscheidung von Siliciumoxid – Diffusionssperrschichten auf PET‐Folien
Author(s) -
Rüegg Andi,
Henseler P.,
Jacquat Y.,
Bapin E.,
Von Rohr Rudolf
Publication year - 1999
Publication title -
chemie ingenieur technik
Language(s) - German
Resource type - Journals
SCImago Journal Rank - 0.365
H-Index - 36
eISSN - 1522-2640
pISSN - 0009-286X
DOI - 10.1002/cite.3307109189
Subject(s) - materials science , physics
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