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130. Silicium‐Mikrosystemtechnik
Author(s) -
Heuberger A.
Publication year - 1993
Publication title -
chemie ingenieur technik
Language(s) - Uncategorized
Resource type - Journals
SCImago Journal Rank - 0.365
H-Index - 36
eISSN - 1522-2640
pISSN - 0009-286X
DOI - 10.1002/cite.3306509132
Subject(s) - citation , library science , physics , computer science