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115. Der Einsatz hochreiner Chemikalien in den Strukturierungsprozessen mikroelektronischer Bauteile
Author(s) -
Haag J.
Publication year - 1993
Publication title -
chemie ingenieur technik
Language(s) - German
Resource type - Journals
SCImago Journal Rank - 0.365
H-Index - 36
eISSN - 1522-2640
pISSN - 0009-286X
DOI - 10.1002/cite.3306509117
Subject(s) - ibm , nat , political science , library science , operating system , computer science , physics , computer network , optics