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113. Materialien und Prozeßmedien für die Mikrosystemtechnik
Author(s) -
Lacher M.,
Lehr H.,
Löwe H.,
Mensinger Hildegard,
Ehrfeld W.
Publication year - 1993
Publication title -
chemie ingenieur technik
Language(s) - German
Resource type - Journals
SCImago Journal Rank - 0.365
H-Index - 36
eISSN - 1522-2640
pISSN - 0009-286X
DOI - 10.1002/cite.3306509115
Subject(s) - philosophy , humanities , physics , theology , art
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