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Erzeugung ultradünner Schichten durch Spin‐Coating‐Prozesse
Author(s) -
Brosius Sibylle,
Lange Gerhard,
Piesche Manfred,
Wiegemann HansBertram
Publication year - 1990
Publication title -
chemie ingenieur technik
Language(s) - Uncategorized
Resource type - Journals
SCImago Journal Rank - 0.365
H-Index - 36
eISSN - 1522-2640
pISSN - 0009-286X
DOI - 10.1002/cite.330620226
Subject(s) - philosophy , art , humanities , theology , art history

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