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Reinraumtechnik
Author(s) -
Gail Lothar
Publication year - 1986
Publication title -
chemie ingenieur technik
Language(s) - English
Resource type - Journals
SCImago Journal Rank - 0.365
H-Index - 36
eISSN - 1522-2640
pISSN - 0009-286X
DOI - 10.1002/cite.330580306
Subject(s) - contamination , contamination control , process engineering , particulates , particle (ecology) , reliability (semiconductor) , cleanroom , environmental science , process (computing) , waste management , engineering , materials science , computer science , chemistry , nanotechnology , physics , ecology , power (physics) , oceanography , organic chemistry , quantum mechanics , biology , geology , operating system
Clean room technology is essentially concerned with the control of particulate contamination. Sources of contamination are: air, work benches, personnel, machines, services. The control of airborne particles has already reached a high level. The cleanliness of process equipment can be further improved by the integration of laminar flow units. Cleanliness requirements and particle analysis meanwhile even cover liquidborne submicron particles. Classification systems for the cleanliness of liquids are in preparation. The contamination of powders results from different particle sources over the whole production process. The quality factor „particle control” is in tended to prevent trouble and improve the economic efficiency and reliability of an increasing number of processes.