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Filtration von CMP‐Slurries als Voraussetzung für Qualitätssicherung und Entsorgungssicherheit
Author(s) -
Berndt R.,
Dalitz L.
Publication year - 2003
Publication title -
chemie ingenieur technik
Language(s) - German
Resource type - Journals
SCImago Journal Rank - 0.365
H-Index - 36
eISSN - 1522-2640
pISSN - 0009-286X
DOI - 10.1002/cite.200390143
Subject(s) - slurry , filtration (mathematics) , materials science , mathematics , composite material , statistics
No abstracts.
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