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Premium Flexible and Epitaxial Metal Oxide Thin Film Growth by Photoreaction Processing for Electrical and Optical Applications
Author(s)
Tsuchiya Tetsuo,
Nakajima Tomohiko,
Uzawa Yuko
Publication year2020
Publication title
chemistry – a european journal
Resource typeJournals
PublisherWiley
Abstract This review summarizes the use of photoreactions that replace conventional heating processes for growing oxide thin films from chemical solutions. In particular, this review outlines key variables in photoreactions that affect epitaxial and polycrystalline thin film growth, including precursor materials, laser wavelength, laser fluence, and carbon. In addition, the features of the photoreaction process that can be controlled at a low temperature by oxygen non‐stoichiometry are examined. Likewise, functions that are neither achieved by developing a gradient structure nor controlled by a thermal equilibrium reaction are detailed. Two new concepts are presented, known as photoreaction of nanoparticles (PRNP) and photoreaction of a hybrid solutions (PRHS), in which crystal nuclei are pre‐dispersed in a metal–organic compound film. This method has successfully produced flexible phosphor films used as resistor or thermistor electronic components. Finally, thin film growth using different light sources such as flash lamps and femtosecond lasers (fs) is explored.
Subject(s)femtosecond , fluence , laser , materials science , metallurgy , nanotechnology , optics , optoelectronics , oxide , physics , thin film
Language(s)English
SCImago Journal Rank1.687
H-Index242
eISSN1521-3765
pISSN0947-6539
DOI10.1002/chem.201905879

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