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Measurement and Analysis of Dynamic Impedance Spectra Acquired During the Oscillatory Electrodissolution of p‐Type Silicon in Fluoride‐Containing Electrolytes
Author(s) -
Koster Dominique,
Patzauer Maximilian,
Salman Munir M.,
Battistel Alberto,
Krischer Katharina,
La Mantia Fabio
Publication year - 2018
Publication title -
chemelectrochem
Language(s) - English
Resource type - Journals
SCImago Journal Rank - 1.182
H-Index - 59
ISSN - 2196-0216
DOI - 10.1002/celc.201800252
Subject(s) - silicon , electrolyte , anodizing , oxide , dissolution , materials science , electrical impedance , electrode , fluoride , inorganic chemistry , analytical chemistry (journal) , chemistry , optoelectronics , metallurgy , aluminium , electrical engineering , chromatography , engineering
Using dynamic multifrequency analysis (DMFA), we investigated the oscillatory reaction dynamics that govern the anodic electrodissolution of p‐type silicon in fluoride‐containing electrolytes, in which the anodization of silicon is followed by the chemical etching of the oxide layer. By applying a constant voltage to the silicon electrode, stable oscillations are found in the presence of an external resistance. The dynamic impedance spectra acquired through DMFA were fitted to a suitable electrical equivalent circuit. In doing so, it was possible to investigate the temporal evolution of the kinetic parameters throughout the formation and dissolution of the silicon oxide.