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Development of an Efficient Method for the Removal of Silane Compounds from Exhaust Air
Author(s) -
Hickstein B.,
Meynhardt B.,
Niemeier O.,
Weber D.
Publication year - 2012
Publication title -
chemical engineering and technology
Language(s) - English
Resource type - Journals
SCImago Journal Rank - 0.403
H-Index - 81
eISSN - 1521-4125
pISSN - 0930-7516
DOI - 10.1002/ceat.201200222
Subject(s) - hexamethyldisiloxane , scrubber , silane , siloxane , process engineering , wet scrubber , scale up , chemistry , waste management , materials science , chemical engineering , organic chemistry , engineering , polymer , physics , plasma , classical mechanics , quantum mechanics
An overview and evaluation of different technologies is presented, which can be applied to remove problematic silane and siloxane compounds from exhaust air. In a lab screening, 96 % H 2 SO 4 was identified to be the most efficient and practical absorbent to remove hexamethyldisiloxane (HMDSO) from exhaust air. Lab scale results were transferred to pilot scale, where the superiority of 96 % H 2 SO 4 in comparison with a previously used scrubber solution (NaOH/MeOH) was demonstrated. In several large scale experiments, the elimination factors of HMDSO from different exhaust airs by 96 % H 2 SO 4 and the capacity of the absorbent were determined. The practicability and robustness of the developed scrubber system using 96 % H 2 SO 4 will allow its easy applicability in API production processes.
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