Premium
Spectroscopic and Morphological Investigation of ZnSn Thin Films Obtained by Radio Frequency Cosputtering
Author(s) -
Lee Seokhee,
Park Juyun,
Kang Yujin,
Choi Ahrom,
Kang YongCheol
Publication year - 2017
Publication title -
bulletin of the korean chemical society
Language(s) - English
Resource type - Journals
SCImago Journal Rank - 0.237
H-Index - 59
ISSN - 1229-5949
DOI - 10.1002/bkcs.11295
Subject(s) - thin film , materials science , x ray photoelectron spectroscopy , wurtzite crystal structure , crystallinity , scanning electron microscope , analytical chemistry (journal) , alloy , nanocrystalline material , chemical engineering , nanotechnology , composite material , metallurgy , chemistry , zinc , chromatography , engineering
In this study, Zn, Sn, and ZnSn (containing 20% of Sn) thin films were fabricated by radio frequency magnetron cosputtering and their properties had been studied with various analytical techniques. The X‐ray photoelectron spectroscopy results showed that the oxidation states of the elements in the alloy thin films change in comparison with the monometallic thin films, namely, Zn was more oxidized wheras Sn was less oxidized. The crystallinity and the conductivity of ZnSn thin films improved compared to monometallic thin films, which were confirmed by X‐ray diffraction (XRD) and four‐point probe. In ZnSn thin films, some Sn thin film formed secondary phase according to the Hume Rothery rules and the other was substituted into Zn sites in the wurtzite hexagonal structure of ZnO. Due to the lattice mismatch, the residual stress was generated and the preferred crystal growth was observed to overcome the stress. This was confirmed by the atomic force microscope and scanning electron microscope.