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Elastic Modulus of HfO 2 Thin Film Grown by Atomic Layer Deposition with Wrinkle‐based Measurement
Author(s) -
Choi HyunJu,
Kim Yongseong
Publication year - 2017
Publication title -
bulletin of the korean chemical society
Language(s) - English
Resource type - Journals
SCImago Journal Rank - 0.237
H-Index - 59
ISSN - 1229-5949
DOI - 10.1002/bkcs.11251
Subject(s) - atomic layer deposition , materials science , layer (electronics) , wrinkle , composite material , elastic modulus , thin film , deposition (geology) , nanotechnology , geology , paleontology , sediment
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