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Fabrication and Characterization of ALD ‐grown ZrO 2 :Ge Thin Films on Si(1 0 0) using CpZr ( NMe 2 ) 3 and ( NMe 2 ) 2 Ge ( i pr 2 en) Precursors with Ozone
Author(s) -
Jung JaeSun,
Kim DaeHyun,
Shin JinHo,
Kang JungSoo,
Thomas Joseph P.,
Leung K. T.,
Kang JunGill
Publication year - 2015
Publication title -
bulletin of the korean chemical society
Language(s) - English
Resource type - Journals
SCImago Journal Rank - 0.237
H-Index - 59
ISSN - 1229-5949
DOI - 10.1002/bkcs.10406
Subject(s) - characterization (materials science) , fabrication , materials science , nanotechnology , thin film , optoelectronics , medicine , alternative medicine , pathology
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