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Adaptive tilting angles to achieve high‐precision scanning of a dual probes AFM
Author(s) -
Wu JimWei,
Lo YuTing,
Liu WeiChih,
Liu DaWei,
Chang KuangYao,
Fu LiChen
Publication year - 2018
Publication title -
asian journal of control
Language(s) - English
Resource type - Journals
SCImago Journal Rank - 0.769
H-Index - 53
eISSN - 1934-6093
pISSN - 1561-8625
DOI - 10.1002/asjc.1881
Subject(s) - tilt (camera) , atomic force microscopy , scanning probe microscopy , materials science , dual (grammatical number) , line (geometry) , optics , process (computing) , computer science , physics , nanotechnology , engineering , geometry , mathematics , mechanical engineering , art , literature , operating system
Atomic force microscopy (AFM) is a powerful measurement tool, widely used in microfabricated structure inspection. However, since it is typical that the fixed tilting angle of a probe is employed in traditional AFM, the corner and sidewall image of the scanned sample would be distorted. To overcome the problem, a so‐called adaptive tilting angle algorithm (ATAA) applied to a self‐designed dual‐probe AFM system is presented to achieve on‐line sidewall estimation during scanning of general samples. Through the use of the proposed ATAA, the tilting angles of dual probes for each scan line can be self‐adjusted to the optimal ones. Overall, a probe tilt mechanism is designed, which allows the AFM system to change the tilting angles of the probes during the scanning process such that the dual‐probe structure AFM can acquire a complete high precision image with just a single scan. The experimental results show the performance of sidewall measurement and the high‐precision image obtained by the proposed method.