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Colored timed Petri nets for modeling and analysis of cluser tools
Author(s) -
Wu NaiQi,
Zhou MengChu
Publication year - 2010
Publication title -
asian journal of control
Language(s) - English
Resource type - Journals
SCImago Journal Rank - 0.769
H-Index - 53
eISSN - 1934-6093
pISSN - 1561-8625
DOI - 10.1002/asjc.183
Subject(s) - petri net , computer science , transient (computer programming) , cluster (spacecraft) , colored , robot , state (computer science) , distributed computing , artificial intelligence , programming language , materials science , composite material
In this paper, a colored timed resource‐oriented Petri net (CTROPN) is developed to model the cluster tools in semiconductor fabrication. It is structurally simple and concise, since each module in a cluster tool corresponds to a unique place in CTROPN. It is also powerful in modeling the qualitative and temporal behavior of the cluster tools with a single‐blade or dual‐blade robot. The initial transient behavior, steady‐state behavior and the final transient behavior can all be investigated through a single model. Copyright © 2010 John Wiley and Sons Asia Pte Ltd and Chinese Automatic Control Society