Premium
Phase appearance during polymerization of fluorinated polyimide monomers and deposition into the microscopic‐scale trenches in supercritical carbon dioxide
Author(s) -
Haruki Masashi,
Oda Asuka,
Wasada Atsuhiko,
Hasegawa Yumi,
Kihara Shin-ichi,
Takishima Shigeki
Publication year - 2016
Publication title -
journal of applied polymer science
Language(s) - English
Resource type - Journals
SCImago Journal Rank - 0.575
H-Index - 166
eISSN - 1097-4628
pISSN - 0021-8995
DOI - 10.1002/app.43334
Subject(s) - supercritical carbon dioxide , monomer , polymerization , supercritical fluid , polymer chemistry , materials science , polyimide , phase (matter) , wafer , chemical engineering , deposition (geology) , chemistry , polymer , organic chemistry , composite material , nanotechnology , layer (electronics) , paleontology , engineering , sediment , biology
The phase appearance during the synthesis of fluorinated polyamic acid (PAA) from 2,2‐bis(3,4‐anhydrodicarboxyphenyl)‐hexafluoropropane (6FDA) and 2,2′‐bis(trifluoromethyl)−4,4′‐diaminobiphenyl (TFDB) in supercritical carbon dioxide (scCO 2 ) was investigated to obtain fundamental data for the deposition of fluorinate polyimides (PI) using scCO 2 . All polymerizations were carried out at 30 MPa for 60 min. The experimental temperatures ranged from 50 to 70 °C, and each of the monomer concentrations ranged from 0.67 × 10 −5 to 3.3 × 10 −5 mol cm −3 . The holding time of the transparent phases, which was the time from the beginning of the polymerization to the appearance of a turbid phase, was increased with either a decrease in the polymerization temperature or a decrease in the initial monomer concentration. The holding time of the fluorinated PAA was longer than that of the monomers of Kapton‐type PAA. The deposition of PI into the microscopic‐scale trenches that had formed on the silicon wafer was successful in scCO 2 . © 2016 Wiley Periodicals, Inc. J. Appl. Polym. Sci. 2016 , 133 , 43334.