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Plasma enhanced chemical vapor deposition of tetraethylorthosilicate and hexamethyldisiloxane on polyester fabrics under pulsed and continuous wave discharge
Author(s) -
Kale Kiran H.,
Palaskar Shital S.
Publication year - 2012
Publication title -
journal of applied polymer science
Language(s) - English
Resource type - Journals
SCImago Journal Rank - 0.575
H-Index - 166
eISSN - 1097-4628
pISSN - 0021-8995
DOI - 10.1002/app.36601
Subject(s) - hexamethyldisiloxane , polyester , plasma enhanced chemical vapor deposition , contact angle , materials science , polymer , fourier transform infrared spectroscopy , plasma polymerization , chemical engineering , polymerization , polymer chemistry , monomer , plasma , analytical chemistry (journal) , chemical vapor deposition , composite material , chemistry , chromatography , nanotechnology , physics , quantum mechanics , engineering
The article reports plasma enhanced chemical vapor deposition (PECVD) of SiO x C y H z polymers on polyester fabric using tetraethylorthosilicate (TEOS) and hexamethyldisiloxane (HMDSO) precursors. Modulated discharge was used to study the effect of duty cycle on the hydrophobic properties of plasma treated‐polyester fabrics. T on and T off periods in modulated discharge were adjusted in such a way to get duty cycle values of 0.25, 0.50, 0.83, and 1.00, respectively. The hydrophobicity of the treated samples was evaluated by static contact angle measurement. Incorporation of SiO, SiCH 3 groups on the surface of polyester fabric was evidenced in Fourier transform infrared (FTIR) spectroscopic analysis. In addition, organic–inorganic character of HMDSO plasma polymer derived under modulated discharge and continuous wave discharge was investigated by FTIR spectroscopy. For equal treatment durations ( T total ), the plasma polymer deposited under pulsed discharge at lower duty cycle showed relatively higher organic content indicating comparatively greater structural retention of the original monomer in modulated discharge. However, structural analysis showed that treatment duration is more critical factor than duty cycle in determining organic character of SiO x C y H z plasma polymers. Ash content results indicated that plasma polymerization proceeds even during T off period. Evaluation of mechanical properties of polyester fabrics showed decrease in tear strength in both TEOS and HMDSO plasma‐treated samples. The durability of plasma polymers to washing showed promising prospects of use of PECVD for functional finishing of polyester fabrics. © 2012 Wiley Periodicals, Inc. J Appl Polym Sci, 2012