Premium
Chemically attaching polyhydroxyethylmethacrylate brush on substrate surface, derivation, and the role in differential etching
Author(s) -
Zhou Feng,
Mu Zonggang,
Wang Tingmei,
Liu Zhilu,
Yu Bo,
Hao Jingcheng,
Liu Weimin
Publication year - 2007
Publication title -
journal of applied polymer science
Language(s) - English
Resource type - Journals
SCImago Journal Rank - 0.575
H-Index - 166
eISSN - 1097-4628
pISSN - 0021-8995
DOI - 10.1002/app.25046
Subject(s) - brush , etching (microfabrication) , dissolution , materials science , polymer chemistry , substrate (aquarium) , aqueous solution , mica , polymerization , chemical engineering , atom transfer radical polymerization , polymer brush , nanotechnology , chemistry , polymer , composite material , layer (electronics) , organic chemistry , oceanography , geology , engineering
This article reports the preparation and derivation of chemically tethered polyhydroxyethylmethacrylate (PHEMA) brush and its application in microfabrication. PHEMA brush was prepared by the surface‐initiated atomic transfer radical polymerization and derived by either organic reaction or sequence polymerization. The differential etching process was studied by atomic force microscope (AFM) and optical micrograph. PHEMA brush cannot prevent the underlying gold from dissolving in aqueous etchant KI/I 2 solution. Differential etching of UV‐patterned PHEMA template resulted in metal (gold) rings. © 2007 Wiley Periodicals, Inc. J Appl Polym Sci 2007