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Novel positive‐type photosensitive polyimide with low dielectric constant
Author(s) -
Jin Xing Zhou,
Ishii Hiroyuki
Publication year - 2005
Publication title -
journal of applied polymer science
Language(s) - English
Resource type - Journals
SCImago Journal Rank - 0.575
H-Index - 166
eISSN - 1097-4628
pISSN - 0021-8995
DOI - 10.1002/app.21994
Subject(s) - tetramethylammonium hydroxide , polyimide , dielectric , polymer chemistry , materials science , solvent , kapton , pyridine , aqueous solution , condensation polymer , sulfonic acid , dielectric loss , chemistry , organic chemistry , polymer , composite material , nanotechnology , optoelectronics , layer (electronics)
A novel positive‐type photosensitive polyimide (PSPI) with a low dielectric constant was developed. The PSPI system was composed of soluble block PI (Bco‐PI) with a hydroxy group and diazonaphthoquinone as a photoreactive compound. The base Bco‐PI was prepared by a direct one‐pot polycondensation of 2,2‐bis(3‐amino‐4‐hydroxy‐phenylhexafluoropropane), 2,2‐bis[4‐(4‐aminophenoxy)phenyl]hexafluoropropane, and cyclohexanetetracarboxylic dianhydride in the presence of a γ‐valerolactone and pyridine catalyst system using N ‐methyl‐2‐pyrrolidone as the solvent. The film of Bco‐PI was colorless and transparent, both important factors for a PSPI. Photosensitive soluble block PI (Bco‐PI), containing 20 wt % ester of 2,3,4‐trihydroxybenzophenone with 1,2‐naphthoquinone‐(2)‐diazide‐5‐sulfonic acid (NT200), showed a sensitivity of 350 mJ/cm 2 and a contrast of 1.20 when it was exposed to UV light, followed by development with 5% tetramethylammonium hydroxide aqueous solution at room temperature. The estimated optical dielectric constants of the PIs with and without NT200 were 2.68 and 2.75, respectively. These values were significantly lower than those of conventional aromatic PIs, such as Kapton film (50EN). © 2005 Wiley Periodicals, Inc. J Appl Polym Sci 98: 15–21, 2005