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Deposition of poly‐ p ‐xylylene films by plasma decomposition of cyclodi‐ p ‐xylylene
Author(s) -
Krasovsky A. M.,
Tolstopyatov E. M.,
Grakovich P. N.
Publication year - 1995
Publication title -
journal of applied polymer science
Language(s) - English
Resource type - Journals
SCImago Journal Rank - 0.575
H-Index - 166
eISSN - 1097-4628
pISSN - 0021-8995
DOI - 10.1002/app.1995.070570112
Subject(s) - chinese academy of sciences , thin film , polymer science , nanotechnology , materials science , political science , law , china