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Gas permeabilities of poly(trimethylsilylpropyne) membranes surface modified with CF 4 plasma
Author(s) -
Lin Xiao,
Xiao Jun,
Yu Yali,
Chen Jie,
Zheng Guodong,
Xu Jiping
Publication year - 1993
Publication title -
journal of applied polymer science
Language(s) - English
Resource type - Journals
SCImago Journal Rank - 0.575
H-Index - 166
eISSN - 1097-4628
pISSN - 0021-8995
DOI - 10.1002/app.1993.070480207
Subject(s) - membrane , plasma , polymeric membrane , analytical chemistry (journal) , polymer chemistry , selectivity , materials science , chemistry , chemical engineering , chromatography , organic chemistry , biochemistry , physics , quantum mechanics , engineering , catalysis
Surface fluorination of poly(trimethylsilylpropyne) (PTMSP) membranes by CF 4 plasma was studied. The surface fluorination of the membranes was carried out in an atmosphere of CF 4 in a capacitively coupled discharge apparatus with external electrodes. Dramatic increase in selectivity ( P o 2/ P N 2) was observed. The effect of fluorination conditions such as duration of treatment and discharge power on the permeabilities of the membranes was studied. X‐ray photoelectron spectrometric data of modified PTMSP membranes showed a drastic alternation in the surface layer. The P o 2and P o 2/ P N 2of the membranes were observed to be dependent on the F/C atomic ratio. At F/C > 1, the P o 2/ P N 2value of the membranes could be more than four. © 1993 John Wiley & Sons, Inc.