Premium
Synthesis and evaluation of methyl methacrylate copolymers and terpolymers as electron beam resists. II. Methyl methacrylate copolymers and terpolymers containing aromatic rings
Author(s) -
Gitsov Ivan,
Todorova Olga G.
Publication year - 1992
Publication title -
journal of applied polymer science
Language(s) - English
Resource type - Journals
SCImago Journal Rank - 0.575
H-Index - 166
eISSN - 1097-4628
pISSN - 0021-8995
DOI - 10.1002/app.1992.070460911
Subject(s) - comonomer , copolymer , methacrylic acid , polymer chemistry , methyl methacrylate , styrene , methacrylate , polymer , monomer , materials science , polymerization , solvent , chemistry , organic chemistry , composite material
Terpolymers of methyl methacrylate and methacrylic acid with vinyl monomers, styrene, 4‐(α, α‐dimethylbenzyl) phenyl methacrylate and 2‐naphthyl methacrylate, were synthesized by radical terpolymerization. The molecular weights of the polymers obtained cover the range of 40,000 to 120,000. It was established that the molecular weight characteristics of the terpolymers are influenced by the content of methacrylic acid in the initial polymerization mixtures, by the chemical nature of the aromatic vinyl comonomer, and by the nature of the solvent and the concentration of the initiator. The sensitivity of the polymers towards radiation was estimated by the G ‐values obtained after the products were subjected to γ‐ray treatment. The influence of the chemical composition of the terpolymers on their sensitivity is discussed in detail. © John Wiley & Sons, Inc.