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Influences of the system pressure and the substrate temperature on plasma polymers
Author(s) -
Ohkubo Junichi,
Inagaki Norihiro
Publication year - 1990
Publication title -
journal of applied polymer science
Language(s) - English
Resource type - Journals
SCImago Journal Rank - 0.575
H-Index - 166
eISSN - 1097-4628
pISSN - 0021-8995
DOI - 10.1002/app.1990.070410127
Subject(s) - polymer , substrate (aquarium) , acetylacetone , polymerization , monomer , aluminium , plasma , polymer substrate , x ray photoelectron spectroscopy , polymer chemistry , materials science , plasma polymerization , chemical engineering , chemistry , organic chemistry , composite material , oceanography , physics , quantum mechanics , engineering , geology
Plasma polymerizations of aluminium‐acetylacetone (AlAcAc) complex using a magnetically enhanced plasma reaction system were investigated as functions of the system pressure and the substrate temperature. The system pressure and the substrate temperature rather than the RF power played an important role in plasma polymerization reactions. The high system pressure and the high substrate temperature led to bond scission of monomers to yield plasma polymers rich in aluminium moieties. The chemical composition of plasma polymers prepared from AlAcAc complex was discussed from spectroscopic results with FT‐IR and XPS.