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Plasma‐polymerized cyclohexane coatings for ethanol and ammonia vapors sensing
Author(s) -
Antony Ananth,
Seo Hyeon Jin,
Boo JinHyo
Publication year - 2020
Publication title -
asia‐pacific journal of chemical engineering
Language(s) - English
Resource type - Journals
SCImago Journal Rank - 0.348
H-Index - 35
eISSN - 1932-2143
pISSN - 1932-2135
DOI - 10.1002/apj.2452
Subject(s) - cyclohexane , coating , materials science , ammonia , conductivity , surface roughness , plasma polymerization , thin film , ammonia gas , dielectric , chemical vapor deposition , chemical engineering , analytical chemistry (journal) , deposition (geology) , surface finish , electrical resistivity and conductivity , polymerization , composite material , optoelectronics , nanotechnology , chemistry , organic chemistry , polymer , paleontology , electrical engineering , sediment , engineering , biology
In this study, plasma‐enhanced chemical vapor deposition of cyclohexane thin films was prepared for application towards ethanol and ammonia vapor sensing between the range 100 and 1,000 ppm. The deposited film exhibited stable, uniform coating and smooth surface morphology with minor surface roughness. The thickness of the coatings was 40–46 nm. The gas‐sensing behavior against the experimental parameters such as coating thickness, operating temperature, and gas concentration was investigated. It was noted that increasing the coating thickness reduced the sensor's electrical conductivity. Increment in the operating temperature from 75°C to 100°C increased the sensor performance linearly. The ethanol and ammonia concentration effects were mainly influenced by the above two factors. The results demonstrated that the cyclohexane thin films can be used to fabricate low‐cost gas sensors in addition to its conventional use as a low dielectric material.