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A new family of heavy transition metal coordination compounds and its application, I. Design, synthesis and characterization of volatile organohafnium precursors
Author(s) -
Grafov Andrei V.,
Mazurenko Eugene A.,
Battiston Giovanni A.,
Zanella Pierino,
Tisato Francesco,
Braga Franco,
Traldi Pietro
Publication year - 1995
Publication title -
applied organometallic chemistry
Language(s) - English
Resource type - Journals
SCImago Journal Rank - 0.53
H-Index - 71
eISSN - 1099-0739
pISSN - 0268-2605
DOI - 10.1002/aoc.590090309
Subject(s) - chemistry , cyclopentadienyl complex , hafnium , mass spectrometry , transition metal , volatility (finance) , fragmentation (computing) , chemical vapor deposition , elemental analysis , characterization (materials science) , nuclear magnetic resonance spectroscopy , coordination complex , inorganic chemistry , metal , organic chemistry , nanotechnology , catalysis , zirconium , materials science , chromatography , computer science , financial economics , economics , operating system
The first three representatives of a new family of volatile organohafnium compounds suitable as metallo‐organic chemical vapour deposition precursors were synthesized. A combination of cyclopentadienyl and alkoxo‐ligands with a bicyclo[2.2.1]heptanc framework was used. Volatility at relatively low temperatures for hafnium compounds was found and the precursors were characterized by elemental analysis and spectroscopic methods (IR, 1 H and 13 C NMR, mass spectrometry and mass‐analysed ion kinetic energy spectroscopy). The outlook for use in hafnium functional materials synthesis was derived from the fragmentation data.