z-logo
Premium
A new family of heavy transition metal coordination compounds and its application, I. Design, synthesis and characterization of volatile organohafnium precursors
Author(s) -
Grafov Andrei V.,
Mazurenko Eugene A.,
Battiston Giovanni A.,
Zanella Pierino,
Tisato Francesco,
Braga Franco,
Traldi Pietro
Publication year - 1995
Publication title -
applied organometallic chemistry
Language(s) - English
Resource type - Journals
SCImago Journal Rank - 0.53
H-Index - 71
eISSN - 1099-0739
pISSN - 0268-2605
DOI - 10.1002/aoc.590090309
Subject(s) - chemistry , cyclopentadienyl complex , hafnium , mass spectrometry , transition metal , volatility (finance) , fragmentation (computing) , chemical vapor deposition , elemental analysis , characterization (materials science) , nuclear magnetic resonance spectroscopy , coordination complex , inorganic chemistry , metal , organic chemistry , nanotechnology , catalysis , zirconium , materials science , chromatography , computer science , financial economics , economics , operating system
The first three representatives of a new family of volatile organohafnium compounds suitable as metallo‐organic chemical vapour deposition precursors were synthesized. A combination of cyclopentadienyl and alkoxo‐ligands with a bicyclo[2.2.1]heptanc framework was used. Volatility at relatively low temperatures for hafnium compounds was found and the precursors were characterized by elemental analysis and spectroscopic methods (IR, 1 H and 13 C NMR, mass spectrometry and mass‐analysed ion kinetic energy spectroscopy). The outlook for use in hafnium functional materials synthesis was derived from the fragmentation data.

This content is not available in your region!

Continue researching here.

Having issues? You can contact us here