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Preparation of copper‐indium sulfide thin films by single‐source OMCVD: Mass‐spectral investigation of decomposition path of the organometallic sources
Author(s) -
Nomura Ryǒki,
Seki Yasuharu,
Konishi Kazuhisa,
Matsuda Haruo
Publication year - 1992
Publication title -
applied organometallic chemistry
Language(s) - English
Resource type - Journals
SCImago Journal Rank - 0.53
H-Index - 71
eISSN - 1099-0739
pISSN - 0268-2605
DOI - 10.1002/aoc.590060808
Subject(s) - chemistry , indium , copper , thin film , vaporization , chalcopyrite , copper sulfide , fragmentation (computing) , sulfide , analytical chemistry (journal) , nanotechnology , organic chemistry , materials science , computer science , operating system
In order to prepare high‐quality CuInS 2 thin films vapor phase decomposition patterns of three copper‐indium binuclear complexes,andas candidates for source materials were investigated using EI MS. The complex 1c showed series of intensive peaks due to the fragmentation of M + . For 1a, only a fragmentation pattern starting from BuIn(S 2 CNBu 2 ) 2 was detectable. This should suggest that 1a decomposed into BuIn(S 2 CNBu 2 ) 2 and copper sulfide before vaporization. In addition an ambiguous feature could be observed for 1b, viz. two fragmentation paths. Consequently, we judge that 1c is a suitable source complex to prepare CuInS 2 thin films via a single‐source OMCVD process. Thus chalcopyrite CuIns 2 thin films were successfully prepared via single‐source OMCVD using 1c as a source complex, with T substrate 400°C, T source 80°C, base pressure 0.7 Torr and carrier (nitrogen) flow rate 0.8 L min −1 . Fragmentation of two copper dithiocarbmates, Cu(S 2 CNBu 2 ) 2 and Cu[S 2 CN(i‐Pr) 2 ] 2 , and two butylindium thiolates, Bu 2 InS(i‐Pr) and BuIn[S(i‐Pr)] 2 , as components of 1 is additionally discussed.