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Utilization of inorganic and organic arsenic compounds in new technologies
Author(s) -
Oikawa Kikuo
Publication year - 1988
Publication title -
applied organometallic chemistry
Language(s) - English
Resource type - Journals
SCImago Journal Rank - 0.53
H-Index - 71
eISSN - 1099-0739
pISSN - 0268-2605
DOI - 10.1002/aoc.590020418
Subject(s) - chemistry , arsenic , inorganic arsenic , environmental chemistry , alkylation , nanotechnology , organic chemistry , catalysis , materials science
This paper reviews the use of arsenic compounds in semiconductor manufacture and emphasizes the role of alkylated arsenic compounds.