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An iron (II) guanidinate compound: Synthesis, characterization, thermal properties and its application as a CVD precursor for iron oxide film
Author(s) -
Zhang Yuxiang,
Du Liyong,
Liu Xinfang,
Ding Yuqiang
Publication year - 2019
Publication title -
applied organometallic chemistry
Language(s) - English
Resource type - Journals
SCImago Journal Rank - 0.53
H-Index - 71
eISSN - 1099-0739
pISSN - 0268-2605
DOI - 10.1002/aoc.4981
Subject(s) - thermogravimetric analysis , chemistry , thermal stability , chemical vapor deposition , oxide , iron oxide , inorganic chemistry , thermal analysis , volatility (finance) , chemical engineering , organic chemistry , thermal , meteorology , engineering , physics , financial economics , economics
An iron compound containing guanidinate ligand [Fe((SiMe 3 ) 2 NC( i PrN) 2 ) 2 ] was synthesized using a conventional lithium‐salt‐elimination reaction, and its chemical structure was characterized through elemental analysis, 1 H‐NMR and single‐crystal X‐ray diffraction, respectively. The thermal properties of the compound were examined through thermogravimetric analysis (TGA), and the TGA results demonstrated that the compound possessed sufficient volatility and suitable thermal stability for the CVD process. Moreover, the deposition experiments were conducted using the synthesized compound as a precursor and O 2 as an oxygen source to confirm its applicability as a CVD precursor, and α ‐Fe 2 O 3 films were successfully deposited at a relatively low deposition temperature (300°C).