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Atmospheric pressure chemical vapour deposition of selenium and tellurium films by UV laser photolysis of diethyl selenium and diethyl tellurium
Author(s) -
Pola Josef,
Bastl Zdeněk,
Šubrt Jan,
Ouchi Akihiko
Publication year - 2001
Publication title -
applied organometallic chemistry
Language(s) - English
Resource type - Journals
SCImago Journal Rank - 0.53
H-Index - 71
eISSN - 1099-0739
pISSN - 0268-2605
DOI - 10.1002/aoc.230
Subject(s) - tellurium , chemistry , selenium , photodissociation , x ray photoelectron spectroscopy , chemical vapor deposition , photochemistry , scanning electron microscope , excimer laser , inorganic chemistry , organic chemistry , laser , chemical engineering , optics , engineering , physics
Excimer laser‐induced photolysis of gaseous diethyl selenium and diethyl tellurium (C 2 H 5 ) 2 M (M = Se, Te) is controlled by cleavage of both MC bonds, it yields C 1 –C 4 hydrocarbons (ethene as major product) and results in chemical vapour deposition of selenium films and nanosized tellurium powder. The selenium and tellurium properties were characterized by X‐ray photoelectron spectroscopy and Scanning electron Microscopy techniques. Copyright © 2001 John Wiley & Sons, Ltd.