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Direct Fabrication of 3D Periodic Inorganic Microstructures using Conformal Phase Masks
Author(s) -
George Matthew C.,
Nelson Erik C.,
Rogers John A.,
Braun Paul V.
Publication year - 2008
Publication title -
angewandte chemie international edition
Language(s) - English
Resource type - Journals
SCImago Journal Rank - 5.831
H-Index - 550
eISSN - 1521-3773
pISSN - 1433-7851
DOI - 10.1002/anie.200804171
Subject(s) - fabrication , materials science , silanol , microstructure , nanotechnology , photonics , phase (matter) , conformal map , condensation , optoelectronics , composite material , catalysis , chemistry , medicine , mathematical analysis , alternative medicine , mathematics , organic chemistry , physics , pathology , thermodynamics , biochemistry
Nitty gritty : A chemically amplified poly(methylsilsesquioxane) resist based on the acid‐catalyzed condensation of silanol end groups was developed for direct fabrication of hybrid 3D microstructures (see picture) by conformal and maskless proximity‐field nanopatterning. Fibers, colloidal particles, helical arrays, and photonic crystals were fabricated by varying phase‐mask design and exposure conditions.