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Integrated Si‐based nanoplasmonic sensor with phase‐sensitive angular interrogation
Author(s) -
Patskovsky Sergiy,
Meunier Michel
Publication year - 2013
Publication title -
annalen der physik
Language(s) - English
Resource type - Journals
SCImago Journal Rank - 1.009
H-Index - 68
eISSN - 1521-3889
pISSN - 0003-3804
DOI - 10.1002/andp.201300078
Subject(s) - materials science , surface plasmon resonance , plasmon , optoelectronics , semiconductor , surface plasmon , phase (matter) , signal (programming language) , silicon , sensitivity (control systems) , interrogation , optics , nanotechnology , electronic engineering , nanoparticle , computer science , physics , archaeology , quantum mechanics , engineering , history , programming language
This work is related to the development of an integrated Surface Plasmon Resonance (SPR) sensor on silicon platform. The optical properties of metallic nanogratings fabricated on the semiconductor structure allow direct plasmonic detection in transmission mode. Specially designed angular interrogation method provides a periodic signal with phase dependent on the conditions of surface plasmon excitation. Proposed technique leads to sensitivity better than 10 −6 RIU for conventional SPR Kretschmann configuration and was tested on the integrated Si‐based nanoplasmonic chip. Developed concept is promising for low‐cost mono and multi ‐sensing applications by portable or stationary platforms.