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Macroscopic intrinsic stress formation in amorphous CuTi films
Author(s) -
Dina S.,
Geyer U.,
v. Minnigerode G.
Publication year - 1995
Publication title -
annalen der physik
Language(s) - English
Resource type - Journals
SCImago Journal Rank - 1.009
H-Index - 68
eISSN - 1521-3889
pISSN - 0003-3804
DOI - 10.1002/andp.19955070702
Subject(s) - materials science , amorphous solid , composite material , stress (linguistics) , ultimate tensile strength , substrate (aquarium) , thin film , alloy , crystallography , nanotechnology , philosophy , linguistics , chemistry , oceanography , geology
Abstract During the growth of amorphous CuTi films prepared under UHV conditions onto quartz substrates, macroscopic intrinsic stresses are generated. The intrinsic stresses are measured in situ as a function of the film thickness for a wide range of substrate temperatures and film compositions. Depending on the preparation conditions, compressive stresses during the early growth stages and thickness‐independent tensile stresses at higher thicknesses are observed. Films with Cu‐content above 50 at% deposited at room temperature do not generate any detectable intrinsic stresses. The results are discussed in terms of a model for the growth of amorphous binary alloy films published earlier.