Open AccessInorganic Stimuli‐Responsive Nanomembranes for Small‐Scale Actuators and Robots
Author(s) -
Tian Ziao,
Wang Yang,
Chen Yimeng,
Xu Borui,
Di Zengfeng,
Mei Yongfeng
Publication year - 2020
Publication title -
advanced intelligent systems
Language(s) - English
Resource type - Journals
ISSN - 2640-4567
DOI - 10.1002/aisy.202070023
Subject(s) - morphing , materials science , actuator , nanotechnology , substrate (aquarium) , planar , semiconductor , robot , optoelectronics , computer science , artificial intelligence , oceanography , computer graphics (images) , geology
Stimuli‐Responsive Nanomembranes As reviewed by Yongfeng Mei and co‐workers in article number 1900092 , micropatterned inorganic stimuli‐responsive nanomembrane array can be fabricated by the planar semiconductor integration process. After releasing from the substrate, the nanomembranes can be easily shaped into various 3D architectures, in response to external environmental stimuli. Such smart materials have a high loading capacity of the fabricated structures and fast actuation speed of the shape morphing.