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Synthesis of SIC(β) ultrafine particles from Si, SiO, or SiO 2 powder and CH 4
Author(s) -
Xu Yu Bing,
Sadakata Masayoshi,
Okubo Tatsuya
Publication year - 1997
Publication title -
aiche journal
Language(s) - English
Resource type - Journals
SCImago Journal Rank - 0.958
H-Index - 167
eISSN - 1547-5905
pISSN - 0001-1541
DOI - 10.1002/aic.690431308
Subject(s) - materials science , ultrafine particle , thermogravimetry , ceramic , hydrogen , chemical engineering , particle (ecology) , scanning electron microscope , differential thermal analysis , powder diffraction , analytical chemistry (journal) , silicon , particle size , silicon carbide , diffraction , metallurgy , nanotechnology , composite material , chemistry , crystallography , organic chemistry , oceanography , physics , optics , geology , engineering
A process for synthesis of ultrafine ceramic particles using a high‐temperature flame is described. Thermodynamic calculations for the Si‐C‐O‐H system were performed using a computer program for calculation of complex chemical equilibrium compositions. Possible synthesis of ultrafine SiC partcles using Si, SiO, and SiO 2 powders (1.0–3.0 μm) as Si sources was investigated using an electric furnace (5 kW) at 2,018 K. Particle products were characterized mainly by X‐ray diffraction analysis, field emission scanning electron microscopy, and thermogravimetry‐differential thermal analysis. Ultrafine particles (18–29 nm) of cubic SiC (β‐SiC) could be produced through Si + CH 4 , SiO + CH 4 and SiO 2 + CH 4 reaction systems, respectively. The effect of hydrogen addition on the synthesis of SiC was also investigated. Ultrafine particles of 96.0% SiC selectivity were obtained when H 2 was added to the SiO + CH 4 reaction system, and the CH 4 /SiO molar ratio in this case was 2.0.