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Film deposition by plasma techniques. By Mitsuharu Konuma, Springer‐Verlag, 1992, 221 pp.
Author(s) -
Graves David B.
Publication year - 1994
Publication title -
aiche journal
Language(s) - Slovak
Resource type - Journals
SCImago Journal Rank - 0.958
H-Index - 167
eISSN - 1547-5905
pISSN - 0001-1541
DOI - 10.1002/aic.690401117
Subject(s) - citation , library science , engineering physics , polymer science , chemistry , engineering , computer science
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