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Excimer laser‐induced deposition of copper films
Author(s) -
Babu Suryadevara V.,
Padiyath Raghunath,
David Moses,
Walsh Lois
Publication year - 1991
Publication title -
aiche journal
Language(s) - English
Resource type - Journals
SCImago Journal Rank - 0.958
H-Index - 167
eISSN - 1547-5905
pISSN - 0001-1541
DOI - 10.1002/aic.690370115
Subject(s) - library science , dept , center (category theory) , engineering , humanities , art , chemistry , computer science , stereochemistry , crystallography