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Temperature distribution reconstruction in Czochralski crystal growth process
Author(s) -
Abdollahi Javad,
Izadi Mojtaba,
Dubljevic Stevan
Publication year - 2014
Publication title -
aiche journal
Language(s) - English
Resource type - Journals
SCImago Journal Rank - 0.958
H-Index - 167
eISSN - 1547-5905
pISSN - 0001-1541
DOI - 10.1002/aic.14486
Subject(s) - czochralski method , process (computing) , materials science , crystal growth , distribution (mathematics) , crystallography , chemistry , mathematics , computer science , mathematical analysis , operating system
A mechanical geometric crystal growth model is developed to describe the crystal length and radius evolution. The crystal radius regulation is achieved by feedback linearization and accounts for parametric uncertainty in the crystal growth rate. The associated parabolic partial differential equation (PDE) model of heat conduction is considered over the time‐varying crystal domain and coupled with crystal growth dynamics. An appropriately defined infinite‐dimensional representation of the thermal evolution is derived considering slow time‐varying process effects. The computational framework of the Galerkin's method is used for parabolic PDE order reduction and observer synthesis for temperature distribution reconstruction over the entire crystal domain. It is shown that the proposed observer can be utilized to reconstruct temperature distribution from boundary temperature measurements. The developed observer is implemented on the finite‐element model of the process and demonstrates that despite parametric and geometric uncertainties present in the model, the temperature distribution is reconstructed with the high accuracy. © 2014 American Institute of Chemical Engineers AIChE J , 60: 2839–2852, 2014