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Large‐Area Rolled‐Up Nanomembrane Capacitor Arrays for Electrostatic Energy Storage
Author(s) -
Sharma Ravikant,
Bufon Carlos César Bof,
Grimm Daniel,
Sommer Robert,
Wollatz Arndt,
Schadewald Jörg,
Thurmer Dominic J.,
Siles Pablo F.,
Bauer Martin,
Schmidt Oliver G.
Publication year - 2014
Publication title -
advanced energy materials
Language(s) - English
Resource type - Journals
SCImago Journal Rank - 10.08
H-Index - 220
eISSN - 1614-6840
pISSN - 1614-6832
DOI - 10.1002/aenm.201301631
Subject(s) - materials science , fabrication , capacitor , capacitance , microsystem , wafer , footprint , dielectric , energy storage , optoelectronics , nanotechnology , voltage , electrical engineering , electrode , medicine , paleontology , power (physics) , chemistry , alternative medicine , physics , pathology , quantum mechanics , biology , engineering
The fabrication, characterization, and optimization of large area rolled‐up ultracompact nanomembrane‐based capacitor arrays is demonstrated by combining bottom‐up and top‐down fabrication methods. The scalability of the process is tested on a 4‐inch wafer platform where 1600 devices are manufactured in parallel. By using a hybrid dielectric layer consisting of HfO 2 and TiO 2 incorporated into an Al 2 O 3 matrix, rolled‐up ultracompact capacitors can have their capacitance per footprint area increased by over two orders of magnitude. Their electrical properties can be precisely controlled by adjusting the oxide composition. Furthermore, the rolling of large‐area nanomembrane‐based structures naturally results in a substantial decrease of the occupied footprint area. Such electrostatic rolled‐up ultracompact energy‐storage elements have a large potential in powering various autonomous microsystems.