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Precursor Decomposition, Microstructure, and Porosity of Yttria Stabilized Zirconia Thin Films Prepared by Aerosol‐Assisted Chemical Vapor Deposition
Author(s) -
Schlupp Meike V. F.,
Martynczuk Julia,
Prestat Michel,
Gauckler Ludwig J.
Publication year - 2013
Publication title -
advanced energy materials
Language(s) - English
Resource type - Journals
SCImago Journal Rank - 10.08
H-Index - 220
eISSN - 1614-6840
pISSN - 1614-6832
DOI - 10.1002/aenm.201200596
Subject(s) - materials science , yttria stabilized zirconia , cubic zirconia , chemical vapor deposition , microstructure , thin film , zirconium , yttrium , chemical engineering , electrolyte , conductivity , porosity , thermal decomposition , composite material , nanotechnology , ceramic , metallurgy , electrode , chemistry , organic chemistry , engineering , oxide
Microstructures of yttria stabilized zirconia thin films deposited by aerosol assisted chemical vapor deposition (AA‐CVD) are correlated with the thermal decomposition behavior of the corresponding metal precursors, zirconium and yttrium 2,4‐pentanedionate. Process conditions of AA‐CVD are investigated with the aim of producing dense and compact YSZ thin films for applications as gas‐tight electrolyte. Based on systematic cross sectional scanning transmission electron microscopy (STEM) investigations and conductivity measurements, the development of percolating nanoporosity is observed in samples prepared at temperatures between 350 °C and 600 °C at standard solution throughput. Compact columnar thin films with bulk conductivity are obtained at 600 °C by reducing the metal content of the precursor solution and at 450 °C by reducing the solution throughput.