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Textured Bi 1/2 Na 1/2 TiO 3 ‐BaTiO 3 Lead‐Free Films with Enhanced Piezoelectric Property and Depolarization Temperature
Author(s) -
Zhou Zhen,
Zhang SuWei,
Zhang Yao,
Luo Jin,
Sun Wei,
Wang Xuping,
Li JingFeng
Publication year - 2018
Publication title -
advanced electronic materials
Language(s) - English
Resource type - Journals
SCImago Journal Rank - 2.25
H-Index - 56
ISSN - 2199-160X
DOI - 10.1002/aelm.201800351
Subject(s) - materials science , piezoelectricity , piezoelectric coefficient , thin film , thermal stability , composite material , hysteresis , nanotechnology , analytical chemistry (journal) , condensed matter physics , chemical engineering , chemistry , physics , chromatography , engineering
Future microelectromechanical systems will need environmentally friendly lead‐free piezoelectrics in the form of thin films, like Bi 1/2 Na 1/2 TiO 3 (BNT); however, its application is limited due to the relatively low depolarization temperature ( T d ). In this work, not only enhanced piezoelectric properties, but also higher T d , are achieved in (001)‐textured 0.94Bi 1/2 Na 1/2 TiO 3 ‐0.06BaTiO 3 (BNT‐BT6) thin films on widely used platinized Si wafers with a LaNiO 3 buffer layer. The piezoelectric coefficient a 33,eff is increased by 65% to 43 pm V −1 in the textured films from 26 pm V −1 in the nontextured counterparts. The texturing also raises the T d to ≈140 °C, about 40 °C higher than that in nontextured films. The increase of T d is attributed to the in‐plane tensile thermal stress and the (001)‐textured structure. The present work provides a guideline to improve piezoelectric properties and the thermal stability of BNT‐based lead‐free piezoelectric thin films.